Title:
交換可能ランプ向けのアダプタ
Document Type and Number:
Japanese Patent JP6431073
Kind Code:
B2
Abstract:
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal coupling to the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
Inventors:
Lanish, Joseph M.
Celebryanov, Oleg Vie.
Celebryanov, Oleg Vie.
Application Number:
JP2016541311A
Publication Date:
November 28, 2018
Filing Date:
November 18, 2014
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01K1/46; H01L21/26; H01R31/06
Domestic Patent References:
| JP2003331613A | ||||
| JP2004296132A | ||||
| JP59069477U | ||||
| JP52154080U | ||||
| JP2010519737A | ||||
| JP2002261037A |
Foreign References:
| US20080199163 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation