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Title:
ADHESION METHOD FOR OPTICAL ELEMENT ON OPTICAL ELEMENT HOLDING DEVICE, OPTICAL ELEMENT HOLDING DEVICE USED THEREFOR, AND EXPOSURE DEVICE HAVING OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JP2013074089
Kind Code:
A
Abstract:

To provide an adhesion method for optical element on optical element holding device, capable of fixing an optical element on an optical element holding device by removing distortion and/or deformation of the optical elements as much as possible even when the optical element is bonded to the optical element holding device, using adhesive.

The adhesion method for optical element LEN on optical element holding device 20 includes the steps for: locally tacking an optical element LEN on a holding frame member 20C, using first adhesive 20s for hardening by the radiation of optical energy; and bonding an outer periphery 20t of the optical element LEN to the holding frame member 20C, using second adhesive 20x with a hardening time slower than that of the first adhesive 20s.


Inventors:
WATANABE KOJI
ISHIBA YUKIO
Application Number:
JP2011211887A
Publication Date:
April 22, 2013
Filing Date:
September 28, 2011
Export Citation:
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Assignee:
TOPCON CORP
International Classes:
H01L21/027; C09J5/00; G02B19/00
Domestic Patent References:
JPH04143929A1992-05-18
JP2000155251A2000-06-06
JPS6323111A1988-01-30
JPS6357605U1988-04-18
JPS6364945A1988-03-23
JPH04166904A1992-06-12
JP2008040086A2008-02-21
Foreign References:
WO2003040785A12003-05-15
Attorney, Agent or Firm:
Tamio Nishiwaki