PURPOSE: To adjust contact pressures of probe pints to be uniform, by separating an electrode plate from a probe card by a prescribed minute distance after all the probe pins contact with the surface of the electrode plate.
CONSTITUTION: A probe card 11 is made close to an electrode plate 9 and fixed in parallel thereto. Next, the electrode plate 9 is made to approach the probe card 11 and contact with any of probe pins 13. Then, all of other probe pins 13 are made to contact with the electrode plate 9 respectively. Subsequently the electrode plate 9 is separated from the probe card 11 by a prescribed minute distance, and the probe pins 13 contacting with the plate are put in non-contact states by means of adjusting screws thereof. Thereafter the electrode plate 9 are made to approach the probe card 11 and the probe pins 13 in the non- contact states are put in contact states by the adjusting screws thereof. This operation is repeated, by the approach or separation of the electrode plate 9 by prescribed minute distances, until all of the probe pins 13 turn to be in contact or non-contact states, and thereby contact pressures of the probe pins 13 can be made uniform.
KANO KENJI
ONO TAKAHIRO
| JPS6239021A | 1987-02-20 | |||
| JPS6364036B2 | 1988-12-09 |