Title:
ポジ型感活性光線性又は感放射線性樹脂組成物、並びに、この組成物を用いた感活性光線性又は感放射線性樹脂膜及びパターン形成方法
Document Type and Number:
Japanese Patent JP5624917
Kind Code:
B2
Inventors:
川端 健志
椿 英明
椿 英明
Application Number:
JP2011047572A
Publication Date:
November 12, 2014
Filing Date:
March 04, 2011
Export Citation:
Assignee:
富士フイルム株式会社
International Classes:
G03F7/039; C08F12/26; C08F20/34; C08F20/60; C08F26/06; C08F28/00; C08F32/08; C08F34/00; G03F7/004
Attorney, Agent or Firm:
Masatoshi Kurata
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi
Shigeo Takakura
Kono 哲
Makoto Nakamura
Toshihiro Fukuhara
Peak Takashi
Toshiro Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Yukinaga Yasujiro
Naoki Kono
Sunagawa 克
Iseki Mamoru 3
Tatsushi Sato
Okada Kishi
Mihoko Horiuchi
Masanori Takeuchi