Title:
吸着剤の製造方法、吸着剤および吸着装置
Document Type and Number:
Japanese Patent JP5037793
Kind Code:
B2
Inventors:
Shintaro Kobayashi
Tomohiko Yoshitake
Tomohiko Yoshitake
Application Number:
JP2005062992A
Publication Date:
October 03, 2012
Filing Date:
March 07, 2005
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
B01J20/04; C01B25/45
Domestic Patent References:
| JP2005017046A | ||||
| JP8071412A | ||||
| JP2005001943A | ||||
| JP2001198208A |
Attorney, Agent or Firm:
Tatsuya Masuda