Title:
吸着固定装置及びその製造方法
Document Type and Number:
Japanese Patent JP4094262
Kind Code:
B2
Abstract:
One object of the present invention is to provide a chucking apparatus and its production method that is capable of carrying out holding, alignment, transport and so forth without causing problems such as the generation of particles. In order to achieve this object, the present invention provides a chucking apparatus provided with a base in which protrusions or grooves are formed on one of its faces to form an irregular surface, and the apical surfaces of protrusions of the irregular surface serve as a chucking surface for chucking and holding a plate-shaped sample, wherein the apical and lateral surfaces of the above protrusions, and the bottom surfaces of the above indentations, are all polished.
Inventors:
Kazunori Endo
Hiroshi Lightning
Hiroshi Lightning
Application Number:
JP2001278360A
Publication Date:
June 04, 2008
Filing Date:
September 13, 2001
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
B23Q3/08; B23Q3/15; H01L21/683; B23Q3/154; H01L21/68; H02N13/00
Domestic Patent References:
| JP9283605A | ||||
| JP9115840A | ||||
| JP2000036399A | ||||
| JP8139169A | ||||
| JP2001176957A | ||||
| JP2000340640A | ||||
| JP2000332091A | ||||
| JP63226939A | ||||
| JP2001118913A | ||||
| JP2000277597A | ||||
| JP7307375A | ||||
| JP2000509552A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama