Title:
吸着方法
Document Type and Number:
Japanese Patent JP6899314
Kind Code:
B2
Abstract:
A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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Inventors:
Hirose Maki
Katsumi Shibayama
Takashi Kasahara
Toshimitsu Kawai
Yasuo Oyama
Kuramoto
Katsumi Shibayama
Takashi Kasahara
Toshimitsu Kawai
Yasuo Oyama
Kuramoto
Application Number:
JP2017221853A
Publication Date:
July 07, 2021
Filing Date:
November 17, 2017
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01L21/67; G02B5/28
Domestic Patent References:
| JP2005509897A | ||||
| JP4188840A | ||||
| JP3081633U | ||||
| JP2006073839A | ||||
| JP2004157292A | ||||
| JP2008053306A |
Foreign References:
| WO2015064749A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama