Title:
ADSORPTIVE HEAD
Document Type and Number:
Japanese Patent JPS55151348
Kind Code:
A
Abstract:
PURPOSE:To exactly isolate two chips slidably by forming a recess adsorptive nozzle engaged in submerged state in half thickness of a chip element and infinitesimally moving the chip of the magazine horizontally upon attraction thereof in vacuum. CONSTITUTION:A guide plate 15 is mounted on the inner surface of an adsorptive head cover 10, at the head, and engaged with sliding groove 20 of an adsorptive nozzle block 11 to horizontally move the block 11. A recess adsorptive nozzle 16 is disposed in the same pattern as the pattern carrying on the substrate on the adsorptive surface of the block 11, and the recess having similar shape as the chip element and half the thickness of the chip is formed at the nozzle 16. After adsorbing the chip 2 to the recess of the nozzle 16 at the end of the opening of the magazine, the block 11 is horizontally moved in infinitesimal distance to isolate the chips 2 so as not be superimposed with the lower chip.
Inventors:
HASEGAWA HIROSHI
Application Number:
JP5912379A
Publication Date:
November 25, 1980
Filing Date:
May 16, 1979
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/677; H01L21/68; H01L21/683; (IPC1-7): H01L21/50