To solve the problem that, in an aerosol deposition system, the concentration of an aerosol generated in an aerosol generator changes during film deposition, and a film deposition rate (a forming rate) drops, or powder is flocculated in the aerosol generator.
The aerosol deposition system comprises: a vessel storing powder; an introduction port connected to the vessel and introducing gas; a delivery port connected to the vessel and delivering an aerosol generated in the vessel to a nozzle side; and a rotary mechanism installed in the vessel, stirring the stored powder and scraping off the powder stuck to the inner wall of the vessel. The bottom part of the vessel has a round shape, and the powder is allowed to continuously gather in the center of the bottom part of the vessel, so as to prevent the flocculation of the powder.
| WO/2007/080042 | NOZZLE ARRANGEMENT FOR, AND METHOD OF, SPRAYING COLD GAS |
| JPWO2013176058 | Cermet powder |
| WO/2019/124135 | FILM-FORMING METHOD |
TAKAHASHI KEIICHI
YOSHIDA MASANORI
Hiroki Naito
Daisuke Nagano
Next Patent: METHOD FOR PRODUCING MOLTEN STAINLESS STEEL