To provide an air bearing device capable of enhancing thickness accuracy and flatness accuracy, and to provide an application apparatus including the air bearing device.
The air bearing device includes a pad part 114 allowed to be floated by floating force caused by discharge of gas and compressed air is supplied from a gas supply source to the pad part 114. The gas supplied to the pad part 114 is discharged from pores of a porous body 115 through an air supply passage 117 and collides on an upper surface 111a of a surface plate to apply floating force. The gas discharged from the porous body 115 is allowed to arrive at an exhaust groove 119 through a comparatively narrow space between a bearing face 103a and the upper surface 111a of the surface plate and exhausted from a non-bearing face 103b to the outside through an exhaust through passage 121. An exhaust passage 118 of the pad part 114 controls a flow direction of ejected gas and prevents gas from entering into an application area.
UEDA SATOSHI
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