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Title:
AIR BEARING DEVICE AND APPLICATION APPARATUS
Document Type and Number:
Japanese Patent JP2014031865
Kind Code:
A
Abstract:

To provide an air bearing device capable of enhancing thickness accuracy and flatness accuracy, and to provide an application apparatus including the air bearing device.

The air bearing device includes a pad part 114 allowed to be floated by floating force caused by discharge of gas and compressed air is supplied from a gas supply source to the pad part 114. The gas supplied to the pad part 114 is discharged from pores of a porous body 115 through an air supply passage 117 and collides on an upper surface 111a of a surface plate to apply floating force. The gas discharged from the porous body 115 is allowed to arrive at an exhaust groove 119 through a comparatively narrow space between a bearing face 103a and the upper surface 111a of the surface plate and exhausted from a non-bearing face 103b to the outside through an exhaust through passage 121. An exhaust passage 118 of the pad part 114 controls a flow direction of ejected gas and prevents gas from entering into an application area.


Inventors:
IKEDA TOSHIYUKI
UEDA SATOSHI
Application Number:
JP2012174198A
Publication Date:
February 20, 2014
Filing Date:
August 06, 2012
Export Citation:
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Assignee:
OILES INDUSTRY CO LTD
International Classes:
F16C32/06; B05C5/02; H01L21/027
Domestic Patent References:
JP2001200843A2001-07-27
JP2008149238A2008-07-03
JPS60113816A1985-06-20
JPS62180114A1987-08-07
JP2004019760A2004-01-22
JP2011133724A2011-07-07
JPH09222124A1997-08-26
JP2010522431A2010-07-01
JP2005308146A2005-11-04
Foreign References:
US20060054774A12006-03-16
Attorney, Agent or Firm:
Naoki Kimiya