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Title:
AIR BEARING DEVICE
Document Type and Number:
Japanese Patent JP2006153226
Kind Code:
A
Abstract:

To dispense with jack-up in initial operation, and to sufficiently keep the balance in carrying.

This air bearing device for obtaining floating force and suction force by blowing air to an upper surface of a carrying region 1 and forming a film by flow of the air between the upper surface of the carrying region and it is provided with a cylinder 3 having an opened lower surface confronting the upper surface of the carrying region and an upper surface closed by an upper wall 3a, a pressurization disk 7 housed in the cylinder slidably along the vertical direction so that a lower surface confronts the upper surface of the carrying region and forming an internal pressure chamber 11 between an upper wall of the cylinder and it, a pressurized air introduction passage 4 for introducing pressurized air into the internal pressure chamber, a blowout hole 8 formed on the pressurization disk and forming the film by the flow of the air between a lower surface of the pressurization disk and the upper surface of the carrying region by blowing the pressurized air introduced into the internal pressure chamber to the upper surface of the carrying region, and an energizing means for energizing the pressurization disk to an upper position where a predetermined space can be secured between the pressurization disk and the upper surface of the carrying region before introducing the pressurized air into the internal pressure chamber.


Inventors:
ISHIKAWA NOBUHIKO
Application Number:
JP2004348038A
Publication Date:
June 15, 2006
Filing Date:
December 01, 2004
Export Citation:
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Assignee:
MITSUBISHI MATERIALS TECHNO CO
International Classes:
F16C32/06
Attorney, Agent or Firm:
Chiharu Shimizu