Title:
AIR BRIDGE WIRING
Document Type and Number:
Japanese Patent JPH088340
Kind Code:
A
Abstract:
PURPOSE: To form an air bridge in a short time while ensuring the mechanical strength and preventing the wring resistance from increasing.
CONSTITUTION: A hole 4a is made immediately above the hollow air bridge part 5 of an air bridge wiring, i.e., an upper layer wiring 4. When the resist for forming the air bridge is removed by means of oxygen plasma or resist stripping liquid, the resist is subjected to the oxygen plasma or the resist stripping liquid through the hole 4a in the wiring 4 as well as from the opposite sides of the wiring 4.
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Inventors:
KATO NAOKO
Application Number:
JP15952994A
Publication Date:
January 12, 1996
Filing Date:
June 17, 1994
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L23/522; H01L21/768; (IPC1-7): H01L21/768
Attorney, Agent or Firm:
Masatomo Sugiura
Next Patent: FABRICATION OF SEMICONDUCTOR DEVICE