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Title:
精密電鋳法のための気泡除去方法
Document Type and Number:
Japanese Patent JP6774668
Kind Code:
B2
Abstract:
To provide a bubble removal method for use in a precision electroforming process, capable of more surely removing a bubble, dramatically improving the accuracy of the shape of a transfer face of an electrodeposited metal layer subsequent to its release from a mold, and improving productivity, in an electrodeposition process carried out at a low current density in an electrolytic liquid in an un-agitated state (a static state).SOLUTION: The precision electroforming process comprises a step of placing a matrix functioning as a cathode and an anode in an electrolytic liquid in an un-agitated state containing a metal ion, a step of applying a voltage between the cathode and the anode to cause an electrodeposition current of a specified low current density flow therebetween so that the metal ion is reduced to a metal element which is deposited on the cathode, and a step of separating the electrodeposited metal layer from the matrix to obtain a reversed shape of the matrix. In the precision electroforming process, the surface of the electrodeposited metal layer is exposed from the electrolytic liquid to remove hydrogen bubbles from the surface of the electrodeposited metal layer while stopping the supply of the electrodeposition current during a period of periodical pressure reduction, and thereafter the surface of the electrodeposited metal layer is immersed in the electrolytic liquid again.SELECTED DRAWING: Figure 5

Inventors:
Gota Yamaguchi
Kume Kendai
Hidekazu Mimura
Application Number:
JP2017096795A
Publication Date:
October 28, 2020
Filing Date:
May 15, 2017
Export Citation:
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Assignee:
National University Corporation Tokyo University
International Classes:
C25D1/00
Domestic Patent References:
JP2003301293A
JP5114175A
JP2003147576A
JP2004346394A
JP2017218631A
Foreign References:
US3316158
Other References:
久米健大 ほか,電鋳法によるナノ精度形状転写プロセスの開発,精密工学会誌,日本,公益社団法人 精密工学会,2014年 6月 5日,80巻6号,582-586頁
Attorney, Agent or Firm:
Takao Yanagino
Norio Morioka
Hisayoshi Sekiguchi
Masato Nakagawa