Title:
AIR CLEANER AND CLEAN ROOM USING IT
Document Type and Number:
Japanese Patent JPH02126912
Kind Code:
A
Abstract:
PURPOSE: To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter.
CONSTITUTION: When the air taken in from an air taking-in opening 6 is blown out from an air blowing-out opening 5, the air is cleaned by the air cleaning filter 10 provided in the vicinity of the air blowing-out opening 5. The adsorption filter 9 is provided in front of the air cleaning filter 10. As a result, the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product are removed.
Inventors:
KAJIMA TOMOAKI
SUZUKI YOSHINOBU
SAITOU SHIYUUSAKU
SUZUKI YOSHINOBU
SAITOU SHIYUUSAKU
Application Number:
JP27861388A
Publication Date:
May 15, 1990
Filing Date:
November 04, 1988
Export Citation:
Assignee:
SHIMIZU CONSTRUCTION CO LTD
International Classes:
F24F7/00; B01D46/00; B01D53/04; F24F7/06; (IPC1-7): B01D46/00; B01D53/04; F24F7/00; F24F7/06
Domestic Patent References:
| JPS61234862A | 1986-10-20 |
Attorney, Agent or Firm:
Masatake Shiga (1 person outside)