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Title:
AIR CONDITIONER, POSITION SENSOR AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2005043021
Kind Code:
A
Abstract:

To provide an air conditioner and the like capable of supplying air conditioned to be at a predetermined temperature to a space to be air-conditioned at an even wind speed even under a condition that an external form is limited.

The air conditioner is equipped with a first air pressure chamber 11 for distributing temperature-controlled air supplied via an air flow-in port 2 along Y direction, a second air pressure chamber 12 for distributing the temperature-controlled air passed through the first air pressure chamber 11 in X direction and a third air pressure chamber 12 located in Z direction to the second air pressure chamber 12 between the second air pressure chamber 12 and a blow-out face 16 and the blow-out face 16 supplies the temperature-conditioned air to the air-conditioned space in a manner widely spreading to the space.


Inventors:
IWATA NAOHIKO
MOTOYAMA CHIZUKO
TAKAHASHI SATOSHI
TAKEBE YUICHI
Application Number:
JP2003279928A
Publication Date:
February 17, 2005
Filing Date:
July 25, 2003
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B11/00; F24F13/06; H01L21/027; (IPC1-7): F24F13/06; G01B11/00; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Masakazu Aoyama
Kazuya Nishi



 
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