PURPOSE: To perform cleaning in a way to reliably blow off dust present deep in a space near the wall of the outer periphery of a filter by a method wherein while a turn table is in a rest state, air nozzles are moved upward or downward by means of an air nozzle drive means.

CONSTITUTION: A turn table 3 is mounted rotatably around a longitudinal axis in a cleaning chamber 6 of a cleaning housing 1. A turn table drive means 2 intermittently drives the turn table 3. While the turn table 3 is in a rest state, air nozzles 4 and 5 are moved upward and downward with the aid of an air nozzle drive means 7. This constitution enables execution of cleaning in a way to reliably blow off dust present deep in space near the wall of the outer periphery of a filter.