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Title:
AIR KNIFE AND DRY PROCESSING SYSTEM EMPLOYING IT
Document Type and Number:
Japanese Patent JP2000146443
Kind Code:
A
Abstract:

To provide an air knife which can be assembled easily and accurately.

An air knife comprises a first planar member 18, a second planar member 19 being jointed thereto and forming a knife body 17 in conjunction with the first planar member 18 having a space part 29 being supplied with compressed air between the joint faces, a first inclining face 21 formed on the joint face between the first and second planar members at one end of the first planar member while inclining at a specified angle with respect to the joint face, a second inclining face 27 formed at one end of the second planar member while inclining at a substantially same angle as the first planar member and forming a slit for ejecting compressed air supplied to the space part from one end side of the knife body in conjunction with the first inclining face, and a screw for coupling the first and second jointed planar members at a specified slide position by means of screws.


Inventors:
YAMAZAKI TAKAHIRO
KANEKO KATSUNORI
Application Number:
JP31908398A
Publication Date:
May 26, 2000
Filing Date:
November 10, 1998
Export Citation:
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Assignee:
SHIBAURA MECHATRONICS CORP
International Classes:
H01L21/304; F26B15/12; F26B21/00; (IPC1-7): F26B21/00; H01L21/304
Attorney, Agent or Firm:
Takehiko Suzue (6 outside)