PURPOSE: To take an action such as positioning in a high speed and a high accuracy by suppressing influence of friction force applied to acting members by means of an external disturbing force compensating member, suppressing influence of compressibility of air by means of an action control unit, detecting uncompensated quantity of the friction force by means of an external disturbing force compensation correcting member, and correcting driving signals to control valves.
CONSTITUTION: Output of an amplifier 9 suppresses influence of compressibility of air exerted on positioning action by means of feedback components of such as position of deflection from an aimed position of an acting member and velocity, and a disturbing force compensating unit 11 outputs opening area commanding values for control valves 3a, 3b necessary for denying friction force of a piston 2 on the basis of friction force presumed in an external disturbing force detecting unit 10. An uncompensated quantity of the friction force is detected by an uncompensated quantity detecting member 14a after receiving, as its inputs, output signals from pressure sensors 8a, 8b, the external disturbing force detecting unit 10 and a position sensor 7, and amplification factor of a driving signal amplifying unit 13 is corrected so as to output the uncompensated quantity and a driving signal necessary for compensating external disturbing force presumed in the external disturbing force detecting unit 10 to the control valves 3a, 3b, by means of an external disturbing force compensation correcting unit 14b. It is possible thereby to compensate friction force correctly and to improve positioning accuracy.
MATSUURA SADAHIRO
TAKASO HIROSHI
TACHIKAWA MASAICHIRO
