PURPOSE: To discharge the static electricity charged on clothes and dusts and consequently prevent dusts from adhering to clothes by a structure wherein a humidifier of air is provided in an air shower stall at a clean room in semiconductor manufacturing plant, drugmaking plant, food processing plant, hospital and the like.
CONSTITUTION: A low speed circulating fan 24 is provided above an air shower stall 12 in a ceiling chamber 10, while a humidifier 26 is provided in a floor chamber 14. The air in the air shower stall 12 is pased through a grill 34 and sucked in the floor chamber 14 in order to be humidified up to 60W80% relative humidity therein. The humidified air is sucked through filters 36 and passages 38 into the ceiling chamber 10 in order to be supplied to the air shower stall 12 by means of high speed fans 22 and the circulating fan 24. Because the air in the air shower stall 12 is humidified, said air acts to lower the resistance against the leakage of static electricity on the surfaces of clothes and dusts, resulting in facilitating the discharge of the static electricity.
KURIHARA YOSHIROU
SHINJIYOU OSAMU
UMIGAMI SHIYUUICHI
NAKAGAWA TOORU
YAMAMOTO YUKIO
HITACHI LTD
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