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Patent Searching and Data


Title:
AIR SPINDLE UNIT
Document Type and Number:
Japanese Patent JP2012167721
Kind Code:
A
Abstract:

To provide an air spindle unit suppressing air consumption and causing no galling phenomenon on the air spindle unit even when the pressure of supplied air is reduced.

The air spindle unit 36 includes a spindle housing 38 defining a thrust air bearing 42 and radial air bearings 40a, 40b, and a motor 44 connected to a spindle 26 and rotating the spindle 26, and includes an air distribution valve 56 distributing high-pressure air to the thrust air bearing 42 and the first and second radial air bearings 40a, 40b. The air distribution valve 56 supplies air only to the second radial air bearing 40b when an air pressure supplied from an air supply source 58 is equal to or larger than a predetermined pressure, and supplies air to the first and second radial air bearings 40a, 40b when a supplied air pressure is smaller than the predetermined pressure.


Inventors:
WAKITA NOBUHIKO
Application Number:
JP2011028072A
Publication Date:
September 06, 2012
Filing Date:
February 14, 2011
Export Citation:
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Assignee:
DISCO CORP
International Classes:
F16C32/06; H01L21/301
Domestic Patent References:
JP2009531626A2009-09-03
JP2010151255A2010-07-08
JP2007112182A2007-05-10
JP2009531626A2009-09-03
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito