Title:
エアスピンドルユニット
Document Type and Number:
Japanese Patent JP5704952
Kind Code:
B2
Inventors:
Nobuhiko Wakita
Application Number:
JP2011028072A
Publication Date:
April 22, 2015
Filing Date:
February 14, 2011
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
F16C32/06; H01L21/301
Domestic Patent References:
| JP2010151255A | ||||
| JP2007112182A | ||||
| JP2009531626A |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito