To provide an air supply and exhaust system for a substrate calcination furnace with high energy efficiency, which is stably operated for a long period of time.
Hot exhaust air exhausted from an exhaust port 14 of a furnace body 10 is sent out as an air flow of hot air to a circulation passage 20 by a fan 21, the air flow is heated by a heater 22, then is purified by a heat resistant HEPA filter 13, and is resupplied to an internal space of the furnace body 10 from a blowout port 12. In the circulation process, one part of the hot air heated by the heater 22 flows into an exhaust pipe 30 and passes through a catalyst unit 31. Since high temperature exhaust gas right after reheating passes through the catalyst unit 31, the exhaust gas flows into a heat exchanger 50 after organic matter contained in the exhaust gas is mostly decomposed. Supply gas heated by heat exchange with the exhaust gas in the heat exchanger 50 is supplied to the circulation passage 20.
MIYAJI YASUYOSHI
NAGASHIMA YASUSHI
KOYO THERMO SYS KK
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Yoshitake Hidetoshi
Takahiro Arita