Title:
AIR EXHAUST/SUPPLY SYSTEM AND CLEAN ROOM SYSTEM
Document Type and Number:
Japanese Patent JP2022034851
Kind Code:
A
Abstract:
To provide a clean room system excellent in user-friendliness.SOLUTION: A clean room system 501 is equipped with at least one room 3 that is set to be negative pressure, and includes a clean room 33, a building 2 in which the room 3 is installed, an air-conditioner 1 that conditions outside air to obtain conditioned air, a first air supply duct 4 that supplies the conditioned air into the room 3, and an exhaust device 6 that exhausts the air in the room 3 to a ceiling 5 with positive pressure formed outside the room 3 and inside the building 2. In the building 2, an exhaust port 21 communicating the ceiling 5 and the outside of the building 2 is formed.SELECTED DRAWING: Figure 1
Inventors:
SUEMATSU TAKAAKI
SAWADA YOSHIMI
SAWADA YOSHIMI
Application Number:
JP2020138744A
Publication Date:
March 04, 2022
Filing Date:
August 19, 2020
Export Citation:
Assignee:
HITACHI PLANT SERVICES CO LTD
International Classes:
F24F7/06; A61L9/00; B01D46/00; F24F11/74
Domestic Patent References:
| JP2017048940A | 2017-03-09 | |||
| JP2013240358A | 2013-12-05 | |||
| JP2018159521A | 2018-10-11 | |||
| JPS5525719A | 1980-02-23 | |||
| JPH10267338A | 1998-10-09 | |||
| JPS58127033A | 1983-07-28 | |||
| JPS6134036U | 1986-03-01 | |||
| JPS5941734A | 1984-03-08 | |||
| JP2018009713A | 2018-01-18 | |||
| JP2007127367A | 2007-05-24 | |||
| JPH09260226A | 1997-10-03 |
Foreign References:
| WO2005119131A1 | 2005-12-15 |
Attorney, Agent or Firm:
Isono International Patent and Trademark Office
Previous Patent: JPWO2022034850
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