Title:
AIR TWEEZER AND SUCTION PAD
Document Type and Number:
Japanese Patent JP2001232573
Kind Code:
A
Abstract:
To provide an air tweezer capable of sucking an object having an extremely small dimension such as a pico slider or a femto slider and arranging it at a predetermined position of a suspension efficiently and providing a countermeasure against ESD.
This air tweezer 1 comprises a tweezer body 2 for gripping when work is done, a tube assembly 5 mounted on the tweezer body 2 and having a suction passage, and a suction pad 6 mounted at a tip of the tube assembly 5 and provided with an opening communicated with the suction passage to suck the object by the suction pad 6 by letting a suction force act on the suction passage of the tube assembly 5. The suction pad 6 is made of an elastic member provided with an electric current carrying path.
Inventors:
UEMATSU YOSHIO
ICHIMURA YOTARO
TSUCHIYA TATSUMI
YOSHIDA TATSUSHI
ICHIMURA YOTARO
TSUCHIYA TATSUMI
YOSHIDA TATSUSHI
Application Number:
JP2000044742A
Publication Date:
August 28, 2001
Filing Date:
February 22, 2000
Export Citation:
Assignee:
IBM
International Classes:
B25B11/00; B25J15/06; (IPC1-7): B25B11/00; B25J15/06
Attorney, Agent or Firm:
Jiro Furobe (3 others)