Title:
ALIGNER EVALUATION SYSTEM, ALIGNER EVALUATION METHOD, ALIGNER EVALUATION PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP3875158
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an aligner evaluation system for use in product development by promptly and easily determining if a plurality of aligners constitute a group of devices worth development.
SOLUTION: The aligner evaluation system has an optical system error data computation means 10a for computing data about differences between optical systems of the plurality of the aligners, a simulation means 10b for simulating a device pattern to be drawn for each of the aligners based on the computed data about optical differences, and an device evaluation means 10c for evaluating each of the aligners based on the simulated device patterns and for determining if the aligners may constitute a group of products worth development.
Inventors:
Takuya Kono
Tatsuhiko Azumaki
Shigeki Nojima
Tatsuhiko Azumaki
Shigeki Nojima
Application Number:
JP2002234053A
Publication Date:
January 31, 2007
Filing Date:
August 09, 2002
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
F04B39/00; H01L21/027; F04C18/356; F04C23/02; F04C29/00; G03F7/20; G03F9/00; G06F15/16; H01L21/02; H01L21/66; H02K7/04; H02K7/14; H02K15/16; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP2002132986A | ||||
| JP8334888A | ||||
| JP6005488A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu