To reduce a time required for editting a parameter set, to reduce a storage capacity required for storing the parameter set, and to reduce a time required for reading the parameter set and transferring it.

In an aligner and a processor for parameter set which are provided with an editting means to prepare or change a parameter set that the values of the respective control parameters used for controlling the aligner are set by a job unit, the editting means 91 applies the set value or changed value of the control parameter inputted by an operator to a plurality of parameter sets. Further, the aligner and processor are provided with a storage means to store the parameter sets, which stores the parameter set as a combination of table data parts 92 and 94 and a set data part 93. The table data part includes a reference data specifying the parameter set referring to the respective parameters of each of parameter sets, and the set data part includes a set value of a control parameter referring to itself by the refererence data.