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Title:
ALIGNER
Document Type and Number:
Japanese Patent JP2011108934
Kind Code:
A
Abstract:

To provide an aligner reducing cycle time without variations in light exposure.

The aligner includes: a chuck 110 mounting a substrate 101; a mask holder 120 holding a mask 102 for transferring a desired pattern onto the substrate 101; light sources 131, 132 for exposure; and a shutter 150 opening and closing the exposure lights from the light sources 131, 132. The shutter 150 has an opening shutter plate to pass exposure light, and a closing shutter plate to shield exposure light. The opening shutter plate and closing shutter plate move in the same direction, and the closing shutter plate is larger in size than the opening shutter plate in the moving direction.


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Inventors:
YAMAIE YUTA
SATO TAKASATO
TAKAHASHI SATOSHI
Application Number:
JP2009264105A
Publication Date:
June 02, 2011
Filing Date:
November 19, 2009
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01L21/027; G03B9/36; G03F7/20
Domestic Patent References:
JPH11111612A1999-04-23
JP2001358052A2001-12-26
JP2006216727A2006-08-17
JP2005252161A2005-09-15
JPH1167656A1999-03-09
JP2006042415A2006-02-09
Attorney, Agent or Firm:
Polaire Patent Business Corporation



 
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