PURPOSE: To provide aligning possibility while servo-inherent vibration avoided by using an X-axis stage and a Y-axis stage having the same product of the rigidity of stage for the movable direction and the weight applied to the stage, adjusting the timing for the X and Y stages after aligning, and performing servo motion.

CONSTITUTION: A servo-off control device 12 receives a signal from an encoder 7, and a command value is fixed, wherein the command value is for a control part 10 to drive an X-stage 1 when the rotational angle of a rotary spindle 5 is such that the X-stage 1 is neutral relative to the gravitation. This is followed by fixation of a command value, which is for the control part 10 to drive a Y-stage 2 when the rotational angle of the rotary spindle 5 is such that the Y-stage 2 becomes neutral relative to the gravitation.