Title:
ALIGNING METHOD AND DEVICE
Document Type and Number:
Japanese Patent JP3634487
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide aligning method/device which can correct an error cause depending on the high-order of a position.
SOLUTION: In the aligning method having a position measuring process S3 for measuring dislocation quantity with setting positions on several positioning objects in plural places whose positions on design are decided on an object, a correction expression generation process S5 for applying the design positions and dislocation quantity of the several objective points to an approximated expression making a relation between the plural design positions and dislocating quantity approximate and fir obtaining a correction expression for calculating dislocation quantity based on design positions on the respective objective points and a aligning process S6 for aligning the aligning object points in accordance with the obtained correction expression, the correction expression contains more than secondary items of the design positions.
Inventors:
Shinichiro Koga
Shigeyuki Uzawa
Shigeyuki Uzawa
Application Number:
JP4687496A
Publication Date:
March 30, 2005
Filing Date:
February 09, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F9/00; G05D3/12; H01L21/027; G01B11/00; (IPC1-7): G05D3/12; G01B11/00; G03F9/00; H01L21/027
Domestic Patent References:
| JP5217848A | ||||
| JP6252027A | ||||
| JP2054103A | ||||
| JP3096219A | ||||
| JP5144698A |
Attorney, Agent or Firm:
Tetsuya Ito
Kazunori Saito
Kazunori Saito
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