Title:
ALIGNMENT MARK AND CONSEALING METHOD FOR CONCAVE USED FOR ALIGNMENT MARK
Document Type and Number:
Japanese Patent JPH1126361
Kind Code:
A
Abstract:
To provide a correct alignment mark without damaging.
An alignment mark (a) is made by forming an Al (aluminum) wiring layer 3 in a concave 10 formed in a film oxides 2 and 6 formed on a surface of a Si(silicon) substrate 1. The metal silicon Si on the surface of the Si substrate 1 is formed so as not to contact the Al wiring layer. The alignment mark (a) on the surface of the Al wiring layer 3 is not damaged, since there is no possibility of reaction between the Al and the Si nor deterioration in the film substance of the film oxide 2 and 6.
Inventors:
OTAKA SHIRO
Application Number:
JP18755097A
Publication Date:
January 29, 1999
Filing Date:
June 27, 1997
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/027; H01L23/544; G03F9/00; (IPC1-7): H01L21/027; G03F9/00
Attorney, Agent or Firm:
Koji Hagiwara (2 outside)