Title:
ALIGNMENT METHOD AND INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2022184029
Kind Code:
A
Abstract:
To provide a technology capable of accurately performing alignment between an electrode pad and a probe.SOLUTION: An alignment method for a probe card including a plurality of probe groups provided correspondingly to a plurality of chips includes a first mode in which for each of the plurality of chips and on the basis of positional information on two or more probes included in the probe groups provided correspondingly to the chips, an inclination and centroid of the probe groups are calculated and an inclination and centroid of the probe card are calculated on the basis of calculated inclinations and centroids of the plurality of probe groups.SELECTED DRAWING: Figure 4
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Inventors:
WATANABE SHINJIRO
Application Number:
JP2021091638A
Publication Date:
December 13, 2022
Filing Date:
May 31, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; G01R31/26
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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