Title:
アライメント方法
Document Type and Number:
Japanese Patent JP7208732
Kind Code:
B2
Abstract:
An objective of the present invention is to quickly find an alignment mark. An alignment method comprises: a process of registering an alignment mark (MA) in an area smaller than a photographing area of a photographing means (51); a process of coupling a plurality of photographed images to form a coupled image (G1) including the alignment mark (MA), and forming a map (K) storing a direction distance in which the alignment mark (MA) exists from each pixel of the coupled image (G1); a first storage process of storing a new photographed image (G2) obtained by photographing a new wafer retained on a table (30); a second storage process of matching the new photographed image (G2) to the map (K) to find the same brightness distribution area as the new photographed image (G2) in the map (K), and storing a direction distance between the same brightness distribution area and the alignment mark (MA); and a process of checking whether the alignment mark (MA) is present in an image (G3) obtained by photographing the table (30) after moving the table (30) based on the direction distance stored in the second storage process. If the alignment mark (MA) has been photographed in the checking process, a line to be divided is specified from the alignment mark (MA).
Inventors:
Satoshi Miyata
Application Number:
JP2018140156A
Publication Date:
January 19, 2023
Filing Date:
July 26, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; B24B49/12; H01L21/68; H01L21/683
Domestic Patent References:
| JP2004241686A | ||||
| JP2138670A | ||||
| JP2004184411A | ||||
| JP2016157870A | ||||
| JP11220006A | ||||
| JP2002198415A |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office