Title:
ALIGNMENT METHOD
Document Type and Number:
Japanese Patent JPS63131009
Kind Code:
A
Abstract:
PURPOSE:To enable automatic alignment even with respect to the alignment marks due to the combination of various material qualities, by forming an areal type mark to the first object and forming an areal type mark different in reflectivity from the first mark consisting of a central part having a size sufficient to surround said first mark and the circumferential part thereof to the second object. CONSTITUTION:An areal type upper mark 1 composed of a metal film is formed to the first object and a lower mark 3 wherein the whole of the visual field of a television camera is formed of a metal film 2 and the central part thereof surrounds the upper mark is formed to the second object in a square shape having a size two times that of the mark 1 so a to leave the original glass surface. Then, the first and second objects are scanned by a scanning line wherein the superposed part of both marks when said marks are observed in a predetermined direction is contained in a scanning region to detect the scanning signals from both objects. Whereupon, the position of the edge of each mark in each of the scanning signals appears as the difference in signal intensity due to the difference in reflectivity.
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Inventors:
ISOBE KAZUHITO
Application Number:
JP27541786A
Publication Date:
June 03, 1988
Filing Date:
November 20, 1986
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/00; G09F9/00; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): G01B11/00; G09F9/00; H01L21/30; H01L21/68
Attorney, Agent or Firm:
Tatsuo Ito