To provide an alignment stage capable of reducing the size of a device and improving turning precision in the θ (theta) direction.
A first driving device 1 can be moved in one direction (V-axis direction) and in another direction (U-axis direction) crossing the V-axis direction at right angles, and a second driving device 2 can be moved in the V-axis direction and in the direction (W-axis direction) parallel to it. The second driving device 2 does not move in the U-direction but follows the U-axis directional movement of the first driving device 1. When the first driving device 1 is moved in one direction along the V-axis direction and the second driving device 2 is moved in the opposite direction along the W-axis, a table 5 is turned in the θ direction. The center position is held by driving the first driving device 1 in the U-aixs direction.
IKEGAMI TAKASHI
HASHIMOTO KAZUNORI
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