Title:
ALIGNMENT UNIT
Document Type and Number:
Japanese Patent JPS542074
Kind Code:
A
Abstract:
PURPOSE:To perform alignment, by scanning alignment mark with a plurality of scanning lines and by introducing only the signl for non-defective scanning lines to the operation circuit.
More Like This:
| JPH033315 | EXPOSURE AND DEVICE THEREFOR |
| JPH02287359 | PHOTORESIST PEELING AGENT |
| JP2723350 | [Title of Invention] Photosensitive resin composition |
Inventors:
KATOU YUUZOU
HIRAGA RIYOUZOU
OGINO YASUO
YOSHINARI HIDEKI
TOTSUKA MASAO
KANOU ICHIROU
SUZUKI AKIYOSHI
HIRAGA RIYOUZOU
OGINO YASUO
YOSHINARI HIDEKI
TOTSUKA MASAO
KANOU ICHIROU
SUZUKI AKIYOSHI
Application Number:
JP6689877A
Publication Date:
January 09, 1979
Filing Date:
June 07, 1977
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/30; G03F9/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JPS4736765A | ||||
| JPS5225575A | 1977-02-25 |
Next Patent: 一輪車用スタンド装置