To provide an alkali-soluble resin having such high alkali solubility as to be suitable for resist compositions, and capable of forming a highly heat-resistant cured product with high resolution without generating low-molecular components including water in its heat treatment process, and to provide a positive-type resist composition and a negative-type resist composition each using the alkali-soluble resin.
The alkali-soluble resin having a benzoxazine ring's ring-opened structure is provided. The resin includes repeat units each of which is made by alternate copolymerization between a benzoxazine ring-bearing compound and an aromatic compound having one or more phenolic hydroxy groups on one of the benzene rings. The resin has a fundamental combination of characteristics inherent in benzoxazine resins including electrical insulation, mechanical strength, flame retardancy and water resistance, and expresses high alkali solubility derived from phenolic hydroxy group-bearing compounds.
SUEZAKI MINORU
RI YOSHU
NAKAMURA MASANORI
