Title:
アルコキシシリルアミン化合物及びその応用
Document Type and Number:
Japanese Patent JP5886818
Kind Code:
B2
Abstract:
Described herein are alkoxysilylamine precursors having the following Formulae A and B:
wherein R 1 and R 4 are independently selected from a linear or branched C 1 to C 10 alkyl group, a C 3 to C 12 alkenyl group, a C 3 to C 12 alkynyl group, a C 4 to C 10 cyclic alkyl group, and a C 6 to C 10 aryl group and wherein R 2 , R 3 , R 4 , R 5 , and R 6 are independently selected from the group consisting of hydrogen, a linear or branched C 1 to C 10 alkyl group, a C 2 to C 12 alkenyl group, a C 2 to C 12 alkynyl group, a C 4 to C 10 cyclic alkyl, a C 6 to C 10 aryl group, and a linear or branched C 1 to C 10 alkoxy group. Also described herein are deposition processes using at least one precursor have Formulae A and/or B described herein.
Inventors:
Manchao Xiao
Ronald Martin Pearlstein
Richard Ho
Daniel P. Spence
Shinjang Ray
Ronald Martin Pearlstein
Richard Ho
Daniel P. Spence
Shinjang Ray
Application Number:
JP2013256054A
Publication Date:
March 16, 2016
Filing Date:
December 11, 2013
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
H01L21/318; C07F7/04; C07F7/18; C23C16/42; H01L21/316
Domestic Patent References:
| JP2011504651A | ||||
| JP2010103495A | ||||
| JP63033429A | ||||
| JP2012025733A | ||||
| JP2010021551A | ||||
| JP10120446A |
Foreign References:
| WO2009008212A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Satoshi Deno
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Yoshihiro Kobayashi
Satoshi Deno