Title:
ALPHA-(P-(DIETHYLAMINO)PHENYL)-N-(ALKYLPHENYL)NITRONE COMPOUND AND CONTRAST ENHANCED MATERIAL
Document Type and Number:
Japanese Patent JP2795000
Kind Code:
B2
Abstract:
PURPOSE: To obtain a new nitrone compound, excellent in compatibility with resins, capable of forming fine resist patterns in high yield and useful as a principal component of a contrast enhanced material(CEM) for enhancing contrast.
CONSTITUTION: An α-[p-(diethylamino)phenyl]-N-(alkylphenyl)nitrone compound expressed by formula 1 (R1 to R5 are H or at least one is alkyl) e.g. α-[p-(diethylamino)phenyl]-N-(2,3-dimethylphenyl)nitrone. The above-mentioned compound can be synthesized by hydrogenating a compound expressed by formula 2 and then reacting the resultant compound expressed by formula 3 with a compound expressed by formula 4. Since the compound expressed by formula 1 has contrast enhancing properties especially for light (i rays) at 365nm wavelength and is excellent in compatibility with resins as a binder for a contrast enhanced material. Thereby, the objective contrast enhanced material capable of forming fine resist patterns having high contrast, high resolution and accuracy in high yield is obtained.
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Inventors:
WATANABE SATOSHI
ISHIHARA TOSHINOBU
ITO KENICHI
ISHIHARA TOSHINOBU
ITO KENICHI
Application Number:
JP22951791A
Publication Date:
September 10, 1998
Filing Date:
August 15, 1991
Export Citation:
Assignee:
SHINETSU KAGAKU KOGYO KK
International Classes:
H01L21/30; C07C291/02; H01L21/027; (IPC1-7): C07C291/02; H01L21/027
Other References:
ＪＯＵＲＮＡＬ ＯＦ ＯＲＧＡＮＩＣ ＣＨＥＭＩＳＴＲＹ，１９８９，５４，５１７６−５１８０
Attorney, Agent or Firm:
Takashi Kojima