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Patent Searching and Data


Title:
ALUMINUM NITRIDE CIRCUIT BOARD AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH06125152
Kind Code:
A
Abstract:

PURPOSE: To provide an aluminum nitride printed circuit board having a smooth surface on which very fine metallic wiring pattern is formed.

CONSTITUTION: A solution containing a silicon compound dissolved in ethyl Cellosolve is applied to an aluminum nitride substrate by spin coating. The coating is dried and heated, so that it becomes a silicon oxide film of 0.1-10 microns, preferably 0.3-5 microns. The silicon oxide film has an average surface roughness Ra ranging from 0.05 to 0.50 micron. When aluminum wirings are formed on the silicon oxide by sputtering, there is obtained a printed circuit board comprising the aluminum nitride coated with silicon oxide of 0.1-10 microns in thickness, which maintains a high thermal conductivity. The printed circuit board may have metallized wirings thinner than 80 microns, possibly 10 microns.


Inventors:
NAGAI YUJI
YOSHIDA AKIRA
Application Number:
JP27280792A
Publication Date:
May 06, 1994
Filing Date:
October 12, 1992
Export Citation:
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Assignee:
TOYO ALUMINIUM KK
International Classes:
H05K1/03; H05K3/38; (IPC1-7): H05K1/03; H05K3/38
Attorney, Agent or Firm:
Hiroshi Arafune (1 person outside)