PURPOSE: To obtain a tough green sheet having satisfactory thermal decomposability and work efficiency by blending AlN powder with a solvent and a copolymer of a specified methacrylic ester monomer as a binder.
CONSTITUTION: This AlN green sheet consists of AlN powder, a solvent and a binder which is a copolymer obtd. by copolymerizing one or more kinds of methacrylic ester monomers represented by the formula with unsatd. carboxylic acid so as to regulate the acid value to 1-5 and the amt. of carboxyl groups to 0.1-0.8mol% of the total amt. of the binder. A sintering aid added to the AlN powder so as to produce a dense sintered compact is preferably Y2O3, CaO, etc. A plasticizer such as dioctyl phthalate or dibutyl phthalate may further be used so as to improve this green sheet.
SUGIURA TOMIYA
OTAKI SHIRO
KAWAKAMI KEIICHI
