Title:
窒化アルミニウム焼結体およびそれを用いた静電チャック
Document Type and Number:
Japanese Patent JP4641758
Kind Code:
B2
Inventors:
Hironori Ishida
Mamoru Ishii
Mamoru Ishii
Application Number:
JP2004229113A
Publication Date:
March 02, 2011
Filing Date:
August 05, 2004
Export Citation:
Assignee:
Taiheiyo Cement Co., Ltd.
International Classes:
C04B35/581; H01L21/683
Domestic Patent References:
| JP2003055052A | ||||
| JP2003261383A |
Attorney, Agent or Firm:
Hiroshi Takayama