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Title:
AMORPHOUS CARBON FILM COATED MEMBER
Document Type and Number:
Japanese Patent JP2014077163
Kind Code:
A
Abstract:

To provide an amorphous carbon film coated member capable of obtaining high wear resistance, preventing an amorphous carbon film from being peeled and sufficiently suppressing release of contaminants from an anodized layer.

An amorphous carbon film coated member 1 has an amorphous carbon film 4 formed through an anodized layer 3 on a base material 2. Residual stress and Vickers hardness are controlled to a predetermined level to suppress a film defect by controlling a tensile residual stress of the anodized layer 3 to 40 MPa or less to suppress occurence of cracks, forming the amorphous carbon film 4 by a plasma CVD method, using hydrogen and carbon as a main component and controlling a hydrogen content to 15-31 at.%.


Inventors:
ADACHI SHIGERU
MIKI SHINYA
Application Number:
JP2012224636A
Publication Date:
May 01, 2014
Filing Date:
October 10, 2012
Export Citation:
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Assignee:
TOCALO CO LTD
International Classes:
C23C16/27
Domestic Patent References:
JP2005320913A2005-11-17
JPH02133584A1990-05-22
JPS6119796A1986-01-28
JP2009242951A2009-10-22
Attorney, Agent or Firm:
Isao Tanaka