Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
AMORPHOUS MULTILAYER STRUCTURE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JP3967791
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To easily and accurately attain a deposition condition and continuously manufacture a constitutional layer, by modulating total ion collision energy by voltage bias adjustment, and depositing a plurality of layers having a specific characteristic.
SOLUTION: A deposition substrate 101 and a pilot unit 307 of a multiphase substance are set up through a substrate holding fixture 304 and an ion source fixture 302 in a pressure reducing vessel 306. By a DC power source 312, a pulse power source 310 and a DC arc power source 308, the pilot unit 307 is vaporized and ionized, so as to form a plurality of gas plasmas having total ion collision energy. Here, by adjusting a voltage bias to the substrate 101, the total ion collision energy is modulated, a plurality of layers having a specific characteristic is deposited on the deposition substrate 101. In this way, without causing a problem of stability due to containing hydrogen, a deposition condition can be easily and accurately attained. A constitutional layer can be continuously manufactured, necessity for many processes with a long time taken is eliminated.


Inventors:
Eric Peas Menu
John son
Bernard F. Cole
Application Number:
JP7901697A
Publication Date:
August 29, 2007
Filing Date:
March 13, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MOTOROLA INCORPORATED
International Classes:
H01J9/02; C23C14/06; C23C14/54; C23C16/34; H01J1/30; H01J1/304; H01J3/02; (IPC1-7): H01J9/02; H01J1/30
Domestic Patent References:
JP8055564A
JP8222122A
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Okimoto Kazuaki