Title:
アモルファスシリコン膜の成膜方法および成膜装置
Document Type and Number:
Japanese Patent JP5337269
Kind Code:
B2
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Inventors:
Kazuhide Hasebe
Hiroki Murakami
Akinori Kakimoto
Hiroki Murakami
Akinori Kakimoto
Application Number:
JP2012084169A
Publication Date:
November 06, 2013
Filing Date:
April 02, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; C23C16/02; C23C16/24; H01L21/28; H01L21/285; H01L21/3205; H01L21/321; H01L21/768; H01L23/532
Domestic Patent References:
| JP4967066B2 | ||||
| JP2009516906A | ||||
| JP2010034580A | ||||
| JP5109637A | ||||
| JP8330423A | ||||
| JP2011216784A | ||||
| JP2011176095A |
Attorney, Agent or Firm:
Hiroshi Takayama