Title:
AMOUNT OF LEAKAGE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2934415
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To measure the amount of leakage accurately by providing a tank in vacuum state and first connecting the tank when an inspection object starts to be evacuated and rapidly evacuating the air in the inspection object.
SOLUTION: When the exchange of an inspection object 3 is completed, a control part 15 closes a valve V8 and prevents intake to the inspection object. Also, a valve V10 is closed and the evacuation of a tank 10 is stopped. A control part 15 opens a valve V9 and rapidly evacuates the inspection object 3 and the air in a mounting tool 2. The control part 15 closes the valve V9 after the evacuation is completed and stops the evacuation, totally opens the valves V5-V7, V1, and V2 and start to evacuate air in a master chamber 1, the inspection object 3, and the mounting tool 2, and repeats the procedure from the beginning. In this manner, before the air in the inspection object 3 and the mounting tool 2 starts to be evacuated, the valve V9 is opened for rapid evacuation. Then, air starts to be evacuated to reach a prescribed vacuum pressure, thus minimizing the scattering measurement data and accurately measuring the amount of leakage.
Inventors:
OGAWA NAGATAKE
Application Number:
JP10317997A
Publication Date:
August 16, 1999
Filing Date:
April 21, 1997
Export Citation:
Assignee:
OGAWA GIKEN KK
TOYOTA JIDOSHA KK
TOYOTA JIDOSHA KK
International Classes:
G01L11/00; G01M3/00; G01M3/26; (IPC1-7): G01M3/26
Attorney, Agent or Firm:
Hideo Takino (1 outside)
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