To measure the amount of leakage accurately by providing a tank in vacuum state and first connecting the tank when an inspection object starts to be evacuated and rapidly evacuating the air in the inspection object.
When the exchange of an inspection object 3 is completed, a control part 15 closes a valve V8 and prevents intake to the inspection object. Also, a valve V10 is closed and the evacuation of a tank 10 is stopped. A control part 15 opens a valve V9 and rapidly evacuates the inspection object 3 and the air in a mounting tool 2. The control part 15 closes the valve V9 after the evacuation is completed and stops the evacuation, totally opens the valves V5-V7, V1, and V2 and start to evacuate air in a master chamber 1, the inspection object 3, and the mounting tool 2, and repeats the procedure from the beginning. In this manner, before the air in the inspection object 3 and the mounting tool 2 starts to be evacuated, the valve V9 is opened for rapid evacuation. Then, air starts to be evacuated to reach a prescribed vacuum pressure, thus minimizing the scattering measurement data and accurately measuring the amount of leakage.
TOYOTA MOTOR CORP
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