Title:
ANALYSER
Document Type and Number:
Japanese Patent JP3424431
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce noise caused by other particles by coaxially arranging an incoming port from which particles come in an analysis device and an outgoing port from which ions go out.
SOLUTION: Ions produced in an ion source 1 are introduced in a vacuum region from an ion introduction fine hole 2 through an intermediate pressure region 4 which is surrounded by a first electrode and a second electrode and exhausted with an exhaust part 3, and an ion introduction fine hole 5, and accelerated with an extraction electrode 6, then sent to an ion trap type mass spectrometry part 30 comprising two end cap electrodes 31, 13, and a ring electrode 33 surrounding the electrodes 31, 32. Ions are introduced into the mass spectrometry part 30 through an ion incoming port 21 opened in the position other than the central axis of the electrode 31, mass separating is conducted, then ions go out from the ion outgoing port 29 through an orbit 11, and detected with an ion detector 16. Other particles are exhausted from an opening part 25 opened in the electrode 32 on the same axis as the incoming port 21 through a linear orbit 15.
Inventors:
Takayuki Nabeshima
Minoru Sakairi
Yasuaki Takada
Yukiko Hirabayashi
Hideaki Koizumi
Minoru Sakairi
Yasuaki Takada
Yukiko Hirabayashi
Hideaki Koizumi
Application Number:
JP7585196A
Publication Date:
July 07, 2003
Filing Date:
March 29, 1996
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
G01N27/62; G01N30/72; H01J49/02; H01J49/26; H01J49/42; (IPC1-7): H01J49/42; G01N27/62; G01N30/72
Domestic Patent References:
| JP785834A | ||||
| JP59134546A | ||||
| JP7326321A | ||||
| JP1163954A | ||||
| JP486516B1 |
Attorney, Agent or Firm:
Yasuo Sakuta