To provide a means capable of performing high-precision measurement and relatively large data processing (analysis) at a high-speed by making a measurement means and an analysis means as a BOST, and reducing the test time.

A mean value processing continuous sampling circuit 202 is provided in an analysis IDDQ test module 200. Once a trigger signal is input to the mean value processing continuous sampling circuit 202 from a semiconductor test device 100, the mean value processing continuous sampling circuit 202 causes an IDDQ measurement part 201 to execute the IDDQ measurement repeated by a prescribed number of times. The value of the IDDQ during measurement is AD converted by a high-precision ADC 203 and sent to a module control part. The module control part stores data which can be used by a data analysis part 207 or the like into a shared data storage part 206.