To eliminate a temperature measurement and analyze a factor for changing a propagation condition when the propagation condition of a propagation face is measured.
A drive frequency of a surface acoustic wave excited on the propagation face 11 of a multiple round surface acoustic wave element 10, is changed, and a change rate of the propagation condition of the surface acoustic wave is found. The mass change quantity Δm dependent on the frequency and the temperature change quantity Δt independent of the frequency are respectively found among the physical quantity for indicating a physical condition of the propagation face 11 by finding a change rate of a round time required for one round while the surface acoustic wave rounds a spherical member 12 many times.
COPYRIGHT: (C)2006,JPO&NCIPI
| JP2003115743A | ||||
| JP6011492A |
石川暁,他5名,球状弾性表面波水素ガスセンサの感度・応答時間評価,超音波エレクトロニクスの基礎と応用に関するシンポジウム講演予稿集,2003年11月12日,Vol.24,P.47-48
赤尾慎吾,他3名,LiNbO3単結晶球における弾性表面波の多重周回現象の観測,超音波エレクトロニクスの基礎と応用に関するシンポジウム講演予稿集,2003年11月12日,Vol.24,P.221-222
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto