To provide a method which can easily analyze surface roughness and waviness in a short time and its device.

When an operator inputs analyzing conditions for surface roughness and waviness (step 21) to indicate the measurement of a work (step 22), the whole estimation range of the work is measured (step 23), and the waviness of the work is analyzed from obtained measurement data (step 24), and approximate surface roughness is analyzed (step 25). Next, the detailed estimation range of the work roughness is set up from the approximate surface roughness (step 26), and only the above detailed estimation range of roughness is automatically remeasured (step 27), and the detailed surface roughness is analyzed from the obtained measurement data (step 28).